INTERFACE REACTIONS AMONG ELECTRODES, SUBSTRATES AND Pb(Zr,Ti)O3-BASED FILMS

Marija Kosec, Barbara Malič, Janez Holc, Marko Hrovat, Mira Mandeljc,
Andreja Benčan, Zoran Samardžija, Goran Dražič

Jožef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia
 

ABSTRACT

Interactions between (Pb,La)(Zr,Ti)O3 (PLZT) thin and thick films and silicon or alumina substrates, respectively, were studied. In the case of thin films the lowering of the firing temperature inhibits the formation of secondary phases. For thick films the additional layer of PLZT between the alumina substrate and the Pt electrode improves adhesion within the PLZT thick-film heterostructures. Interactions between conductive oxides which could be used as electrodes  instead of noble metals and PZT-based materials are reported.
Key words: ferrolectric ceramics, interactions, heterostructrure, films, conductive oxides